✦ LIBER ✦
Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N[sub 2]: Neutral kinetic energies and source gas cracking
✍ Scribed by Materer, N.; Goodman, Rory S.; Leone, Stephen R.
- Book ID
- 121343761
- Publisher
- American Institute of Physics
- Year
- 1998
- Tongue
- English
- Weight
- 273 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.366916
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