Comparison of E-beam and Sputter-Deposited ITO Films for 1.55 μm Metal–Semiconductor–Metal Photodetector Applications

✍ Scribed by Jang, Soohwan; Kang, B. S.; Ren, F.; Emanetoglu, N. W.; Shen, H.; Chang, W. H.; Gila, B. P.; Hlad, M.; Pearton, S. J.

• Book ID: 125503457
• Publisher: The Electrochemical Society
• Year: 2007
• Tongue: English
• Weight: 162 KB
• Volume: 154
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2667428