✦ LIBER ✦
Comparison of different methods for simulating the effect of specular ion reflection on microtrenching during dry etching of polysilicon
✍ Scribed by D. Kunder; E. Bär
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 485 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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