Comparison of Coupling Methods for Linking Between Reactor and Feature Scales

✍ Scribed by Jonathan Jilesen; Fue-Sang Lien

• Publisher: John Wiley and Sons
• Year: 2010
• Tongue: English
• Weight: 163 KB
• Volume: 16
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200906800

✦ Synopsis

Abstract

Currently there are two main methods used for coupling macroscopic reactor‐scale and microscopic feature‐scale models in multi‐scale CVD simulation. These methods differ in the plane selected for coupling. With one method, coupling occurs at a source plane offset from the deposition surface, while in the other method coupling occurs on the deposition surface itself. The two methods also have different feature‐scale modeling techniques associated with them. A Monte Carlo (MC) technique is used for the source plane‐coupling method, while a ballistic transport technique is used for the deposition surface‐coupling method. In this study a multi‐scale code with a ballistic feature‐scale model is modified so that both coupling methods can be applied, allowing for direct comparison of the two coupling methods.