✦ LIBER ✦
Comparison of charge generation from hot wires between AC and DC power supply and its effect on deposition behavior during hot-wire chemical vapor deposition of silicon
✍ Scribed by Soon-Young Park; Shin-Jae You; Chan-Soo Kim; Nong-Moon Hwang
- Book ID
- 108166097
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 767 KB
- Volume
- 312
- Category
- Article
- ISSN
- 0022-0248
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