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Comparison of boron halide, decaborane and B implants in Si from Molecular Dynamics simulations

โœ Scribed by R.P. Webb; S.H. Winston; R.M. Gwilliam; B.J. Sealy; G. Boudreault; C. Jeynes; K.J. Kirkby

Book ID
114166499
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
442 KB
Volume
202
Category
Article
ISSN
0168-583X

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