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Comparison of 3D Surface Reconstruction Data from Certified Depth Standards Obtained by SEM and an Infinite Focus Measurement Machine (IFM)

✍ Scribed by Schroettner, Hartmuth ;Schmied, Mario ;Scherer, Stefan


Book ID
106196730
Publisher
Springer-Verlag
Year
2006
Weight
256 KB
Volume
155
Category
Article
ISSN
0344-838X

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