✦ LIBER ✦
Comparative XPS and SIMS depth profile analysis of Cu-implanted silicon: evidence of segregation effects
✍ Scribed by E. Darque-Ceretti; M. Aucouturier
- Book ID
- 113281026
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 478 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0168-583X
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