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Comparative study on dry etching of α- and β-SiC nano-pillars

✍ Scribed by J.H. Choi; L. Latu-Romain; E. Bano; A. Henry; W.J. Lee; T. Chevolleau; T. Baron

Book ID
116730963
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
375 KB
Volume
87
Category
Article
ISSN
0167-577X

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