✦ LIBER ✦
Comparative study of thin film physical properties for TiNx deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycrystalline iron substrates
✍ Scribed by Ph. Roquiny; A. Poulet; Y. Leys; J.-C. Descamps; F. Bodart; P. VandenBrande
- Book ID
- 114086811
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 219 KB
- Volume
- 355-356
- Category
- Article
- ISSN
- 0040-6090
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