✦ LIBER ✦
Comparative study of Si(111), silicon oxide, SiC and Si3N4 surfaces by secondary ion mass spectroscopy (SIMS)
✍ Scribed by A. Benninghoven; W. Sichtermann; S. Storp
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 253 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0040-6090
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