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Comparative study of kinetic energy spectra and mass distributions of Tan+ ions sputtered from tantalum by atomic and molecular ion bombardment

โœ Scribed by S.F. Belykh; U.Kh. Rasulev; A.V. Samartsev; I.V. Veryovkin


Book ID
114169789
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
584 KB
Volume
136-138
Category
Article
ISSN
0168-583X

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