Comparative study of damage production in ion implanted III–V-compounds at temperatures from 20 to 420 K

✍ Scribed by E Wendler; B Breeger; Ch Schubert; W Wesch

• Book ID: 114170568
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 342 KB
• Volume: 147
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00597-7