✦ LIBER ✦
Comparative study of copper films prepared by ionized metal plasma sputtering and chemical vapor deposition in the Cu/TaN/SiO2/Si multilayer structure
✍ Scribed by Khin Maung Latt; C. Sher-Yi; T. Osipowicz; K. Lee; Y. K. Lee
- Book ID
- 110314595
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 310 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0022-2461
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