✦ LIBER ✦
Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods
✍ Scribed by Lei, Hao; Wang, Meihan; Hoshi, Yoichi; Uchida, Takayuki; Kobayashi, Shinichi; Sawada, Yutaka
- Book ID
- 123203161
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 1015 KB
- Volume
- 285
- Category
- Article
- ISSN
- 0169-4332
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