Comparative evaluation of Ti salicide and Co salicide processes for CMOS devices

✍ Scribed by Hirofumi Sumi; Kazuhiro Tajima; Jun Suenaga; Hideo Harifuchi; Yutaka Okamoto

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 151 KB
• Volume: 81
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/(sici)1520-6432(199808)81:8<26::aid-ecjb4>3.0.co;2-#