✦ LIBER ✦
Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition
✍ Scribed by A.A. Puretzky; D.B. Geohegan; G.E. Jellison Jr.; M.M. McGibbon
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 572 KB
- Volume
- 96-98
- Category
- Article
- ISSN
- 0169-4332
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