✦ LIBER ✦

Compact superconducting SR ring for X-ray lithography

✍ Scribed by Noriyuki Takahashi

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Compact SR light source for x-ray lithog

✍ Noriyuki Takahashi 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 415 KB

Survey of compact storage rings for X-ra

✍ N. Holtkamp; R. Maier; E. Weihreter 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 162 KB

Resonance injection method for the compa

✍ Takeshi Takayama 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 366 KB

Compact superconducting storage ring wit

✍ V.G. Veshcherevich; P.D. Vobly; G.N. Kulipanov; N.A. Mezentsev; L.G. Morgunov; A 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 247 KB

An X-ray exposure system for 100-nm-orde

✍ H. Tsuyuzaki; M. Fukuda; M. Suzuki; T. Kaneko; N. Takeuchi; M. Kanai 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 266 KB

An advanced x-ray stepper for 15-μm SR l

✍ S. Ishihara; M. Suzuki; M. Kanai; M. Fukuda 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 364 KB