Compact grating interferometer for producing photoresist gratings with incoherent light

✍ Scribed by Post, Daniel ;Patorski, Krzysztof ;Ning, Peitai

• Book ID: 115334885
• Publisher: The Optical Society
• Year: 1987
• Tongue: English
• Weight: 970 KB
• Volume: 26
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.26.001100