𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Comment on “Morphology of Silicon Nitride Grown from a Liquid Phase”

✍ Scribed by Mikito Kitayama; Kiyoshi Hirao; Motohiro Toriyama; Shuzo Kanzaki


Book ID
110828140
Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
90 KB
Volume
83
Category
Article
ISSN
0002-7820

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Liquid phase deposited silicon oxide wit
✍ Lee, Ming-Kwei ;Ho, Chen-Lin ;Zeng, Jia-Yi 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 208 KB

## Abstract This study investigates the growth of silicon oxide film on gallium nitride using hydrosilicofluoric acid and silica gel by the temperature‐difference liquid‐phase deposition. In the conventional liquid phase deposition, the boric acid is used as fluorine scavenger to prompt silicon oxi