✦ LIBER ✦
Combined optimization and hybrid scalar–vector diffraction method for grating topography parameters determination
✍ Scribed by P.-E. Hansen; L. Nielsen
- Book ID
- 103844493
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 179 KB
- Volume
- 165
- Category
- Article
- ISSN
- 0921-5107
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