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Combined NRA, channeling-RBS and FTIR ellipsometry analyses for the determination of the interface and bonding state of thin SiOxand SiNxOylayers

✍ Scribed by R. W. Michelmann, H. Baumann, A. Markwitz…


Book ID
120751828
Publisher
Springer
Year
1995
Tongue
English
Weight
438 KB
Volume
353
Category
Article
ISSN
1618-2650

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