Combined NRA, channeling-RBS and FTIR ellipsometry analyses for the determination of the interface and bonding state of thin SiOxand SiNxOylayers

✍ Scribed by R. W. Michelmann, H. Baumann, A. Markwitz…

• Book ID: 120751828
• Publisher: Springer
• Year: 1995
• Tongue: English
• Weight: 438 KB
• Volume: 353
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/BF00322078