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Combined magnetron sputtering and pulsed laser deposition of carbides and diamond-like carbon films

✍ Scribed by Voevodin, A. A.; Capano, M. A.; Safriet, A. J.; Donley, M. S.; Zabinski, J. S.


Book ID
119953905
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
368 KB
Volume
69
Category
Article
ISSN
0003-6951

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