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Combined effects of thermophoresis and electrophoresis on particle deposition onto a wafer

✍ Scribed by R. Tsai; Y.P. Chang; T.Y. Lin

Book ID: 117130475
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 180 KB
Volume: 29
Category: Article
ISSN: 0021-8502
DOI: 10.1016/s0021-8502(97)10025-8

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