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Combined dry and wet etching techniques to form planar (011) facets in GaInAsP/InP double heterostructures

✍ Scribed by Coldren, L.A.; Furuya, K.; Miller, B.I.; Rentschler, J.A.


Book ID
120050767
Publisher
The Institution of Electrical Engineers
Year
1982
Tongue
English
Weight
601 KB
Volume
18
Category
Article
ISSN
0013-5194

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