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Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots

✍ Scribed by Rogge, M. C.; Fühner, C.; Keyser, U. F.; Haug, R. J.; Bichler, M.; Abstreiter, G.; Wegscheider, W.

Book ID: 120939685
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 315 KB
Volume: 83
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1599972

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