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Combinatorial synthesis of thin film libraries for microwave dielectrics

✍ Scribed by B. Wessler; V. Jéhanno; W. Rossner; W.F. Maier

Book ID
108418204
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
318 KB
Volume
223
Category
Article
ISSN
0169-4332

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## Abstract **Summary:** Thin film technology has been attracting much interest as a tool for making combinatorial libraries of solid state materials including organic compounds and polymers as well as their devices. Especially, physical vapor deposition is very frequently used in research and deve