Combinatorial Generation and Analysis of Nanometer- and Micrometer-Scale Silicon Features via “Dip-Pen” Nanolithography and Wet Chemical Etching

✍ Scribed by D. A. Weinberger; S. Hong; C. A. Mirkin; B. W. Wessels; T. B. Higgins

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 289 KB
• Volume: 12
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/1521-4095(200011)12:21<1600::aid-adma1600>3.0.co;2-6