✦ LIBER ✦
Combinatorial Chemical Vapor Deposition. Achieving Compositional Spreads of Titanium, Tin, and Hafnium Oxides by Balancing Reactor Fluid Dynamics and Depositions Kinetics.
✍ Scribed by Ryan C. Smith; Noel Hoilien; Jimmy Chien; Stephen A. Campbell; Jeffrey T. Roberts; Wayne L. Gladfelter
- Publisher
- John Wiley and Sons
- Year
- 2003
- Weight
- 68 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0931-7597
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