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Collision Processes of Hydrocarbon Species in Hydrogen Plasmas. Part 1. The Methane Family

✍ Scribed by R. K. Janev; D. Reiter


Publisher
John Wiley and Sons
Year
2003
Weight
55 KB
Volume
34
Category
Article
ISSN
0931-7597

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✦ Synopsis


Abstract

For Abstract see ChemInform Abstract in Full Text.


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## Abstract Silicon carbonitride (Si:C:N) films are produced by hydrogen remote microwave plasma (RP)CVD using a 1,1,3,3‐tetramethyldisilazane precursor. The effect of the substrate temperature on the rate and yield of the hydrogen RPCVD process, chemical composition, chemical structure, and surfac