✦ LIBER ✦
Collision cascade limit to spatial resolution in focused ion beam processes
✍ Scribed by G. Betz; F. Rüdenauer
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 736 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0169-4332
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