Coherent extreme-ultraviolet generation at 64 nm by efficient frequency tripling of an ArF laser

✍ Scribed by Hirakawa, Yasuyuki; Okada, Tatsuo; Maeda, Mitsuo; Muraoka, Katsunori

• Book ID: 115395077
• Publisher: Optical Society of America
• Year: 1997
• Tongue: English
• Weight: 277 KB
• Volume: 14
• Category: Article
• ISSN: 0740-3224
• DOI: 10.1364/JOSAB.14.001029