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Coevaporated thin films of Y-Ba-Cu-O utilizing quadrupole mass-spectrometer rate control

✍ Scribed by J. Hudner; H. Ohlsén; L. Stolt; M. Östling

Book ID
116017795
Publisher
Elsevier Science
Year
1990
Weight
525 KB
Volume
164-165
Category
Article
ISSN
0022-5088

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A temperature-controlled chemical vapor deposition (TC-CVD) process was developed for in-situ growth of highly c-axis orientated YtBa2Cu30~+x (YBCO) thin films directly on sapphire substrates. This new CVD process, for the first time, uses programmable temperature controllers to optimize and tailor