A Conservative Finite Difference Method
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Phillip Colella; Milo R Dorr; Daniel D Wake
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Article
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1999
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Elsevier Science
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English
β 328 KB
This paper describes a numerical method for the solution of a system of plasma fluid equations. The fluid model is similar to those employed in the simulation of high-density, low-pressure plasmas used in semiconductor processing. The governing equations consist of a drift-diffusion model of the ele