✦ LIBER ✦
Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode
✍ Scribed by Masaki Matsushita; Abul Kashem; Shinzo Morita
- Book ID
- 108388364
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 75 KB
- Volume
- 407
- Category
- Article
- ISSN
- 0040-6090
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