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Co-Ni alloy thin film for rigid disk

โœ Scribed by J. Endo; S. Murakami; S. Fujii; H. Harada; H. Maeda


Book ID
113313596
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
298 KB
Volume
54-57
Category
Article
ISSN
0304-8853

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Compact sputtering apparatus for deposit
โœ Yoshitaka Kitamoto; Masanori Abe; Masahiko Naoe ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 347 KB

Co^Cr films deposited at excessively low Ar pressure P Ar often reveal critically poor c-axis orientation for the magnetron sputtering system. It has been found that high energy Ar atoms recoiled from the target plane would bombard heavily the growing films and degrade films' crystallographic charac