✦ LIBER ✦

CMOS–MEMS integration today and tomorrow

✍ Scribed by Ann Witvrouw

Book ID: 113897459
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 612 KB
Volume: 59
Category: Article
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2008.06.043

No coin nor oath required. For personal study only.

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