✦ LIBER ✦
CMOS integrated tactile sensor array by porous Si bulk micromachining
✍ Scribed by Mária Ádám; Tibor Mohácsy; Péter Jónás; Csaba Dücső; Éva Vázsonyi; István Bársony
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 759 KB
- Volume
- 142
- Category
- Article
- ISSN
- 0924-4247
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