✦ LIBER ✦
Clustering of random point defects and yield statistics in VLSI circuit fabrication
✍ Scribed by Bernhard Neudecker
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 215 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0038-1101
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