✦ LIBER ✦
Clustering effects in plasma-assisted chemical fluid deposition of copper: Similarities between deposition rate and density fluctuation
✍ Scribed by Tsuyohito Ito; Tomoya Tamura
- Book ID
- 108109314
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 319 KB
- Volume
- 502
- Category
- Article
- ISSN
- 0009-2614
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