Cluster ion formation during sputtering processes: a complementary investigation by ToF-SIMS and plasma ion mass spectrometry

✍ Scribed by Welzel, T; Mändl, S; Ellmer, K

• Book ID: 121481642
• Publisher: Institute of Physics
• Year: 2014
• Tongue: English
• Weight: 666 KB
• Volume: 47
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/47/6/065204