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Cleaved and etched facet nitride laser diodes

✍ Scribed by Abare, A.C.; Mack, M.P.; Hansen, M.; Sink, R.K.; Kozodoy, P.; Keller, S.; Speck, J.S.; Bowers, J.E.; Mishra, U.K.; Coldren, L.A.; DenBaars, S.P.

Book ID
117866177
Publisher
IEEE
Year
1998
Tongue
English
Weight
88 KB
Volume
4
Category
Article
ISSN
1077-260X

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## Abstract Different technologies have been evaluated in order to create vertical and smooth facets for GaN‐based laser diodes on non‐ and semipolar substrates. Laser assisted scribing and cleaving proved to be a suitable method to create __c__‐, __a__‐ and __m__‐plane facets for devices grown on