✦ LIBER ✦
Cleaning of submicrometer structures on Si-masters with pulsed excimer laser and reactive ion etching
✍ Scribed by A. Braun; K. Otte; K. Zimmer; St. Rudschuck; D. Hirsch; F. Bigl
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 180 KB
- Volume
- 69
- Category
- Article
- ISSN
- 1432-0630
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