✦ LIBER ✦
Classification of semiconductor defects using a small number of training data and qualitative knowledge
✍ Scribed by Shohei Shimomura; Hajime Igarashi; Takashi Hiroi; Naoki Hosoya; Yasuo Nakagawa
- Publisher
- Wiley (John Wiley & Sons)
- Year
- 2008
- Tongue
- English
- Weight
- 559 KB
- Volume
- 91
- Category
- Article
- ISSN
- 1942-9533
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