✦ LIBER ✦
Classification of defect spatial signatures using independent component analysis and estimation of process/tool malfunctions using χ2 test and exact test
✍ Scribed by Eiji Yamada; Katsuki Imai; Tetsuro Toyoshima
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 641 KB
- Volume
- 178
- Category
- Article
- ISSN
- 0424-7760
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