✦ LIBER ✦
Chlorine incorporation and electrical properties at silicon surfaces oxidized in trichloroethylene-oxygen
✍ Scribed by H. Frenzel; B.R. Singh; K. Haberle; P. Balk
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 306 KB
- Volume
- 58
- Category
- Article
- ISSN
- 0040-6090
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