✦ LIBER ✦
Chlorine adsorption on electron beam irradiated GaAs photo-oxides: mechanism of in situ EB lithography
✍ Scribed by Yuichi Ide; Masamichi Yamada
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 519 KB
- Volume
- 82-83
- Category
- Article
- ISSN
- 0169-4332
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