✦ LIBER ✦
Chip yield for FETs fabricated on low-surface-defect GaAs wafers grown by a new MBE system
✍ Scribed by S. Kato; J. Shigeta; T. Miyata; M. Kawata; N. Tamura; K. Takahashi
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 332 KB
- Volume
- 70-71
- Category
- Article
- ISSN
- 0169-4332
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