✦ LIBER ✦
Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique
✍ Scribed by Daniel Sang-Won Park; Youngkyun Jeong; Jeong-Bong Lee; Sungyong Jung
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 666 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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