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Chemomechanical Functionalization and Patterning of Silicon

✍ Scribed by Li Yang; Yit-Yian Lua; Michael V. Lee; Matthew R. Linford

Publisher: John Wiley and Sons
Year: 2006
Weight: 8 KB
Volume: 37
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.200613269

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